Ta₂O₅

Ta₂O₅ Tantalum Pentoxide Material for Advanced Energy and Thin Film Applications

BiTeSe Thermoelectric Material Sputtering Target

Ta₂O₅

Tantalum Pentoxide

Ta₂O₅

Ta₂O₅

Tantalum Pentoxide (Ta₂O₅)

Product Description

Ta₂O₅ is a high performance oxide material composed of tantalum and oxygen, widely used in semiconductor manufacturing, thin film deposition, optical coatings, and advanced electronic applications. These materials are valued for their high dielectric constant, excellent chemical stability, low leakage current, and outstanding thermal and corrosion resistance.

Product Specifications

Composition: Ta, O (various atomic ratios)
Purity: ≥ 99.99%
Density: ≥ 90% theoretical density
Dimension: OD 50.8 mm – 450.0 mm
Tolerance diameter: ±0.1 mm
Thickness tolerance: ±0.1 mm
Surface Roughness: 32 RMS

Ta₂O₅ Materials

High purity Ta₂O₅ material is designed for semiconductor manufacturing, thin film deposition, and advanced dielectric applications. Ta₂O₅ belongs to the family of high-k oxide materials widely used in integrated circuits, capacitors, optical coatings, and microelectronic devices.

These materials are engineered to provide excellent dielectric performance, optical transparency, and long-term chemical stability. By carefully controlling composition and microstructure, Ta₂O₅ materials can be optimized for both research and industrial applications.

This material is commonly used in advanced electronics, semiconductor research, optical systems, and thin film deposition processes.

Applications of Ta₂O₅ Materials

Ta₂O₅ materials are widely used in advanced semiconductor and optical technologies.

Common applications include:

  • Semiconductor and thin film research
  • Thin film deposition and sputtering targets
  • High-k dielectric layers
  • Capacitors and integrated circuits
  • Optical coatings and photonic devices
  • Microelectronics and MEMS devices
  • Advanced materials research and development


The ability to control the composition of Ta₂O₅ allows engineers and researchers to optimize dielectric performance, optical properties, thermal stability, and chemical resistance for specialized applications.

Ta₂O₅ Sputtering Targets for Thin Film Deposition

Ta₂O₅ sputtering targets are used in physical vapor deposition (PVD) processes to produce high quality oxide thin films with excellent dielectric and optical properties. These targets enable precise control of material composition during deposition, making them ideal for research laboratories, semiconductor manufacturing environments, and advanced materials development.

Thin films produced using Ta₂O₅ sputtering targets are commonly applied in semiconductor devices, dielectric layers, optical coatings, capacitors, MEMS devices, and advanced photonic systems.

Notice: Pioneer Materials can manufacture custom Ta₂O₅ sputtering targets and compound materials according to specific customer requirements, including tailored composition, density, dimensions, backing plate bonding, and custom geometries.

Request a Quote for Ta₂O₅ Materials

Contact Pioneer Materials to learn more about our high purity Ta₂O₅ materials and custom sputtering targets. Our team can provide customized compositions, dimensions, bonding options, and manufacturing solutions designed to meet your semiconductor, dielectric, optical coating, and advanced thin film deposition requirements.

Request a Quote

Please fill out the form with your specific requirements, and our dedicated team will promptly review your request and provide you with a comprehensive quotation tailored to your needs. We are committed to delivering the highest quality materials and exceptional service to meet your unique demands.

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